The method of calculating the effect of thermal stress on the dynamic characteristics of inertial microelectromechanical systems (MEMS) is presented in this article. Testing was conducted on a technique of vibrating gyroscope LL type electrostatic actuator in a temperature range from -40 to 80 ° C. It is shown that the thermoelastic stresses lead to a shift in the natural oscillation frequencies and the change of amplitude-frequency characteristics of the system. Method of calculation is based on the sequential solution of differential equations of heat conduction and the generalized Hooke's law, taking into account thermal stresses. Modal analysis and construction of MEMS amplitude-frequency characteristics is performed considering prestressed calculated in the previous step.

Keywords: microelectromechanical systems, micromechanical gyroscope, thermoelastic stresses, temperature errors, numerical simulation, frequency response

The work is devoted to the synthesis of a linear acceleration sensor with two axes of sensitivity behavioral model based on the mathematical model of this device in the differential equations form using MatLab software package Simulink environment. The results of the dynamics simulation of the synthesized behavioral sensor model in the form of transient and spectral analysis of the system reaction are shown. The main idea of analysis is to study the frequency parameters and damping properties of the object. The experiment has identified high quality factor of the oscillatory system, due to small damping, it is reflected by the slow decay of transient and pronounced resonances.

Keywords: microsystem technology, microelectromechanical systems, electronic components, accelerometer, sensor, design, model, modeling, transient, spectral analysis

The work is devoted to the synthesis of a angular rate sensor behavioral model based on the mathematical model of this device in the differential equations form using MatLab software package Simulink environment. The results of the dynamics simulation of the synthesized behavioral sensor model in the form of transient and spectral analysis of the system reaction are shown. The main idea of analysis is to study the frequency parameters and damping properties of the object. The experiment has identified high quality factor of the oscillatory system, due to small damping, it is reflected by the slow decay of transient and pronounced resonances.

Keywords: microsystem technology, microelectromechanical systems, electronic components, gyroscope, electrostatics, design, model, modeling, transient, spectral analysis

Developed criteria for matching the oscillation frequencies of sensitive elements biaxial functionally integrated micromechanical gyroscopes-accelerometers LL-type. Review the results of modeling.

Keywords: microsystm technology, element base, model, modeling, gyroscope, accelerometer, sensor

The model of micromechanical mirrors mobile elements balance is developed. The received results of modelling of a micromechanical mirror are considered. 

Keywords: microsystm technology, element base, model, modeling, mirror

  The integrated sensor LR-type on the basis of carbon nanotube is described. Are offered a method of processing of the sensor signals. Results of modelling are represented.

Keywords: Еlement base, microelectromechanical system, design, sensor, gyroscope, accelerometer.

The received results of modelling of a micromechanical sensor of angular speeds and linear accelerations are considered. 

Keywords: microsystm technology, element base, modeling, sensor, gyroscope, accelerometer